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VPCF100EUVQ-L
UHV fused silica viewport, optical | 412306Connection type
CF
Nominal diameter
100
Window material
Fused silica (EUV laser-grade)
View diameter
98 mm
Transmission range
190-2000 nm
Surface quality
20/10 (scratch/dig)
Flatness (at 632,8 nm)
< lambda/4
Connection type
CF
Nominal diameter
100
Window material
Fused silica (EUV laser-grade)
View diameter
3.858 ″
Transmission range
190-2000 nm
Surface quality
20 scratch/dig
Flatness (at 632,8 nm)
< lambda/4
| Category | UHV fused silica viewport, optical |
|---|---|
| Bakeout temperature | 392 °F |
| Max. bakeout temperature | 200 °C |
| Window thickness | 0.236 ″ |
| Maximum heating rate | 20 K/min |
| Article no. | 412306 |
| Connection type | CF |
| Nominal diameter | 100 |
| Leakrate | < 1E-10 mbar ∙ l/s |
| Min. operating temperature | -100 °C |
| Min. operating temperature | -148 °F |
| Max. operating temperature | 200 °C |
| Max. operating temperature | 392 °F |
| Outer diameter | 151,6 mm |
| Outer diameter | 5.969 ″ |
| Length | 19,8 mm |
| Length | 0.78 ″ |
| View diameter | 3.858 ″ |
| Window mounting | Brazed |
| Window thickness | 6 mm |
| Surface quality | 20/10 (scratch/dig) |
| Window material | Fused Silica (EUV laser-grade) |
| Transmission range | appr. 190 - 2000 nm |
| View diameter | 98 mm |
| Flatness (at 632,8 nm) | < lambda/4 |
| Homogeneity (index variation over clear aperture) | < 1 ppm |
| Inclusions (cross section per 100 cm³ of glass) | < 0.03 mm² |
| Purity class | PCS |
| Parallelism | < 10" |
| DN | Nominal diameter | 100 |
|---|---|---|
| AD | Outer Diamter | 151,6 mm |
| D1 | View diameter | 98 mm |
| L1 | Hight | 19,8 mm |
| L2 | Window thickness | 6 mm |
| DN | Nominal diameter | 100 |
|---|---|---|
| AD | Outer Diamter | 5.969 ″ |
| D1 | View diameter | 3.858 ″ |
| L1 | Hight | 0.78 ″ |
| L2 | Window thickness | 0.236 ″ |
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