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VPCF63EUVQ-L-BBAR1
UHV fused silica viewport, optical, BBAR-coated | 406428Connection type
CF
Nominal diameter
63
Window material
Fused silica (EUV laser-grade)
Coated diameter
> 59 mm
Coating wavelength(s)
225-450 nm
Reflectivity per surface
Ravg < 1,5%
Surface quality
20/10 (scratch/dig)
Flatness (at 632,8 nm)
< lambda/4
Connection type
CF
Nominal diameter
63
Window material
Fused silica (EUV laser-grade)
Coated diameter
> 59 mm
Coating wavelength(s)
225-450 nm
Reflectivity per surface
Ravg < 1,5%
Surface quality
20 scratch/dig
Flatness (at 632,8 nm)
< lambda/4
| Category | UHV fused silica viewport, optical, BBAR-coated |
|---|---|
| Bakeout temperature | 392 °F |
| Max. bakeout temperature | 200 °C |
| Window thickness | 0.236 ″ |
| Maximum heating rate | 20 K/min |
| Coated diameter | > 59 mm |
| Coating type | Broadband AR |
| Article no. | 406428 |
| Connection type | CF |
| Nominal diameter | 63 |
| Leakrate | < 1E-10 mbar ∙ l/s |
| Min. operating temperature | -100 °C |
| Min. operating temperature | -148 °F |
| Max. operating temperature | 200 °C |
| Max. operating temperature | 392 °F |
| Outer diameter | 113,5 mm |
| Outer diameter | 4.469 ″ |
| Length | 17,4 mm |
| Length | 0.685 ″ |
| View diameter | 2.677 ″ |
| Window mounting | Brazed |
| Window thickness | 6 mm |
| Reflectivity per surface | Ravg < 1,5% |
| Surface quality | 20/10 (scratch/dig) |
| Wavelengthrange | 225-450 nm |
| Window material | Fused Silica (EUV laser-grade) |
| Transmission range | appr. 190 - 2000 nm |
| View diameter | 68 mm |
| Flatness (at 632,8 nm) | < lambda/4 |
| Homogeneity (index variation over clear aperture) | < 1 ppm |
| Inclusions (cross section per 100 cm³ of glass) | < 0.03 mm² |
| Purity class | PCS |
| Parallelism | < 10" |
| DN | Nominal diameter | 63 |
|---|---|---|
| AD | Outer Diamter | 113,5 mm |
| D1 | View diameter | 68 mm |
| L1 | Hight | 17,4 mm |
| L2 | Window thickness | 6 mm |
| DN | Nominal diameter | 63 |
|---|---|---|
| AD | Outer Diamter | 4.469 ″ |
| D1 | View diameter | 2.677 ″ |
| L1 | Hight | 0.685 ″ |
| L2 | Window thickness | 0.236 ″ |
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