VPCF63EUVQ-L-VAR1
UHV fused silica viewport, optical, VAR-coated | 408950Connection type
CF
Nominal diameter
63
Window material
Fused silica (EUV laser-grade)
Coated diameter
> 59 mm
Coating wavelength(s)
193 nm
Reflectivity per surface
R < 0,25%
Surface quality
20/10 (scratch/dig)
Flatness (at 632,8 nm)
< lambda/4
Connection type
CF
Nominal diameter
63
Window material
Fused silica (EUV laser-grade)
Coated diameter
> 59 mm
Coating wavelength(s)
193 nm
Reflectivity per surface
R < 0,25%
Surface quality
20 scratch/dig
Flatness (at 632,8 nm)
< lambda/4