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1 Meter High AluVaC® Chamber for LIST
Analytical technology is closely linked to nanoscale research. Spectroscopy and high-resolution microscopy are used. The Luxembourg Institute of Science and Technology (LIST) is a mission-oriented research and technology organization that develops prototypes for public and private sector users. In this context, LIST has developed an unique analysis tool based on a helium ion microscope. This analytical microscope has an unexampled lateral resolution of 15 nm. This makes objects visible that are 100,000 times smaller than the diameter of a human hair. The spectrometer of the microscope, which is now commercially available, is embedded in a special vacuum chamber (one-meter high vacuum chamber from the AluVaC® series), which LIST and VACOM have jointly developed.
The UHV-capable chamber is made entirely of aluminum and has various CF and ISO ports. Low pressures are quickly reached due to a more energy-efficient bake-out up to 120°C (248°F). The low magnetic permeability and the minimal outgassing of the material of the AluVaC® series excellently meet the technological requirements, for example, of the semiconductor industry, in the production of lithium batteries, in biology or in medicine.