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Shaping the future of microchips

We deliver precision and cleanliness.

Semiconductor Industry

The semiconductor industry produces microelectronic components and assemblies based on semiconductor materials. Since the digital age, the demand for microchips has increased immensely for many industries with their individual product fields. To meet this trend, large chip manufacturers are implementing even more powerful and miniaturised chip architectures in process windows, sometimes at the limits of what is technically feasible. In addition to the high-tech nature of production, the constant maintenance of quality and cleanliness under cleanroom conditions within the process and supply chain is another major challenge. Established manufacturing processes such as EUV and DUV, but also forward-looking technologies such as High-NA, address different requirements for the process vacuum and the cleanliness of the vacuum parts and components used.

VACOM is a main supplier for companies in EUV applications with various vacuum technology products, precisely and specifically cleaned according to the VACOM® Purity Classes. High precision manufactured vacuum components and parts meet industry requirements for filmic and particulate surface cleanliness and low outgassing rates. 

We offer you:


Semiconductor highlight products

    Sub-D basic | 346305
    Magnetic
    Yes
    Installation
    KF
    Nominal width
    50
    Number of contacts
    15
    Current per contact
    3 A
    Voltage
    0.5 kV DC
    Plug connections
    Both sides
    Purity class
    PCS
    Magnetic
    Yes
    Installation
    KF
    Nominal width
    50
    Number of contacts
    15
    Current per contact
    3 A
    Voltage
    0,5 kV DC
    Plug connections
    Both sides
    Purity class
    PCS
    Please login to see prices.
    available
    "3 in 1" - wide range vacuum sensor | 379025
    Connection type
    CF
    Nominal diameter
    40
    Pressure range
    1E-11 - 1000 mbar
    Principle of measurement
    Pirani, Time of flight spectrometry, Hot cathode
    Bakeout temperature
    392 °F
    Interface type
    RS232, RS485, Bluetooth, Analogue
    Purity class
    PCS
    Connection type
    CF
    Nominal diameter
    40
    Pressure range
    1E-11 - 1000 mbar
    Principle of measurement
    Pirani, Time of flight spectrometry, Hot cathode
    Bakeout temperature
    200 °C
    Interface type
    RS232, RS485, Bluetooth, Analogue
    Purity class
    PCS
    Please login to see prices.
    available
    Rotating Union - extended | 367167
    Mounting flange
    CF16
    Material mounting flanges
    Stainless steel (316L)
    Transferable torque
    0.678 lb-ft
    Max. no load spin speed
    1000 rpm
    Max. shaft axial load
    20 N
    Max. bakeout temperature
    482 °F
    Purity class
    PCS
    Mounting flange
    CF16
    Material mounting flanges
    Stainless steel (316L)
    Transferable torque
    0,5 Nm
    Max. no load spin speed
    1000 U/min
    Max. shaft axial load
    20 N
    Max. bakeout temperature
    250 °C
    Purity class
    PCS
    Please login to see prices.
    available
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