We deliver precision and cleanliness.
The semiconductor industry produces microelectronic components and assemblies based on semiconductor materials. Since the digital age, the demand for microchips has increased immensely for many industries with their individual product fields. To meet this trend, large chip manufacturers are implementing even more powerful and miniaturised chip architectures in process windows, sometimes at the limits of what is technically feasible. In addition to the high-tech nature of production, the constant maintenance of quality and cleanliness under cleanroom conditions within the process and supply chain is another major challenge. Established manufacturing processes such as EUV and DUV, but also forward-looking technologies such as High-NA, address different requirements for the process vacuum and the cleanliness of the vacuum parts and components used.
VACOM is a main supplier for companies in EUV applications with various vacuum technology products, precisely and specifically cleaned according to the VACOM® Purity Classes. Our component cleaning is approved according to ASML grades 1 to 4 and specified according to ZEISS 1000711. High precision manufactured vacuum components and parts meet industry requirements for filmic and particulate surface cleanliness and low outgassing rates.